Scanning Electron Microscope and EDAX

Scanning Electron Microscope and EDAX

We have a FEI Quanta 200 environmental scanning electron microscope (ESEM) with EDAX EDS system. Our SEM produces enlarged images of a variety of specimens, achieving magnifications of over 100000x providing high resolution imaging in a digital format. The EDS system attached with the SEM enables the elemental analysis of the samples.

This SEM have a tungsten gun which is capable of imaging the samples under different vacuum regimes such as High-vacuum (10-2 to 10-4 Pa), Low-vacuum (10 – 130 Pa) and ESEM-vacuum (10 – 2600 Pa).

Vacuum modes for different kinds of samples:

HiVac: Conductive samples.
LoVac: Nonconductive, mixed or contaminating samples.
ESEM: Wet samples (use H2O gas medium).

The scanning electron microscope (SEM) is a type of electron microscope that images the sample surface by scanning it with a high-energy beam of electrons. These electrons interact with the atoms that make up the sample producing signals that contain information about the sample's surface topography, composition and other properties. The types of signals made by an SEM can include secondary electrons (SE) back scattered electrons (BSE), characteristic X-rays and light. These signals are captured by various detectors.

Standard Detectors:

– Everhart Thornley Detector (ETD)
It is a scintillator photo-multiplier type detector monitoring electrons generated by the primary beam interaction with the specimen surface. It is permanently mounted in the chamber above and to one side of the sample. It works in two modes:

  • Secondary Electrons (SE)
  • Backscattered Electrons (BSE).

– Backscattered Electrons (BSED)
These are two-segment low-voltage diodes. The BSED is designated for a HiVac large field of view.

– Large Field Detector (LFD)
The signal from the LFD contains more BSE information. This detector is ideal for general imaging at LoVac mode.

– Gaseous Secondary Electron Detector (GSED)
It is used for general wet imaging and for high pressure imaging with auxiliary gases.

For further information about the SEM technique, please visit   http://en.wikipedia.org/wiki/Scanning_electron_microscope

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