High-resolution field emission scanning electron microscope (HR-FESEM) and EDAX
Instrument specification
Thermo Scientfic Verios G4 UC High resolution field emission scanning electron microscope (FESEM) operates at a variety of voltages ranging from 2 – 30 kV. It has Schottky FEG electron gun having an adjustable probe current ranging between 0.8 nA – 100 nA. It has a magnification of over 1,000,000 x providing a high resolution of 0.6 nm. FESEM operates under a vacuum system that is entirely oil-free. Differential pumping on the electron column ensures tip operation at the ultra-high vacuum levels (10-10 mbar).
Technicalities
The Verios G4 UC features through-the-lens (TLD) SE and BSE detection specifically designed for high-resolution
imaging at both high and low kVs, as well as an Everhart-Thornley SE detector for conventional SE detection. The in-lens SE detector features a technique where the energy range of the detected secondary electrons can be selected. The sample stage can be rotated 360 o and tiled to – 60 o making the system very versatile. Scan rate for the system ranges from 50 ms all the way upto 50 s.